Producción CyT
Capítulo de Libro
Autoría
A. Aguirre
;
C.A. Méndez
Fecha
2010
Editorial y Lugar de Edición
ELSEVIER
Libro
Computer-Aided Chemical Engineering, 28
(pp. 883-888)
ELSEVIER
ELSEVIER
ISBN
978-0-444-53569-6
Resumen
Información suministrada por el agente en
SIGEVA
This work addresses the short-term scheduling of one of the most critical stages in the semiconductor industry, the automated wet-etch station (AWS). An efficient MILP-based computer-aided tool is developed in order to achieve a proper synchronization between the activities of sequential chemical and water baths and limited automated wafer’s lot transfer devices. The major goal is to find the optimal integrated schedule that maximizes the whole process productivity without generating wafe...
This work addresses the short-term scheduling of one of the most critical stages in the semiconductor industry, the automated wet-etch station (AWS). An efficient MILP-based computer-aided tool is developed in order to achieve a proper synchronization between the activities of sequential chemical and water baths and limited automated wafer’s lot transfer devices. The major goal is to find the optimal integrated schedule that maximizes the whole process productivity without generating wafer contamination.
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Palabras Clave
SchedulingSemiconductorAWSMILP