Science and Technology Production
Book Chapter
Authorship
A. Aguirre
;
C.A. Méndez
Date
2010
Publishing House and Editing Place
ELSEVIER
Book
Computer-Aided Chemical Engineering, 28
(pp. 883-888)
ELSEVIER
ELSEVIER
ISBN
978-0-444-53569-6
Summary
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SIGEVA
This work addresses the short-term scheduling of one of the most critical stages in the semiconductor industry, the automated wet-etch station (AWS). An efficient MILP-based computer-aided tool is developed in order to achieve a proper synchronization between the activities of sequential chemical and water baths and limited automated wafer’s lot transfer devices. The major goal is to find the optimal integrated schedule that maximizes the whole process productivity without generating wafe...
This work addresses the short-term scheduling of one of the most critical stages in the semiconductor industry, the automated wet-etch station (AWS). An efficient MILP-based computer-aided tool is developed in order to achieve a proper synchronization between the activities of sequential chemical and water baths and limited automated wafer’s lot transfer devices. The major goal is to find the optimal integrated schedule that maximizes the whole process productivity without generating wafer contamination.
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Key Words
SchedulingSemiconductorAWSMILP