A simulation-based framework for industrial automated wet-etch station scheduling problem in the semiconductor industry

Producción CyT

Capítulo de Libro

Autoría

A. Aguirre ; V. Cafaro ; C.A. Méndez ; P. Castro

Fecha

2011

Editorial y Lugar de Edición

Edit. by A. Bruzzone, M.A. Piera, F. Longo, P. Elfrey, M. Affenzeller and O. Balci

Libro

Proceedings of the 23rd European Modeling & Simulation Symposium (EMSS2011) (pp. 384-393)
Edit. by A. Bruzzone, M.A. Piera, F. Longo, P. Elfrey, M. Affenzeller and O. Balci

ISBN

978-88-903724-4-5

Resumen Información suministrada por el agente en SIGEVA

This work presents the development and application of an advanced modelling, simulation and optimizationbased framework to the efficient operation of the Automated Wet-etch Station (AWS), a critical stage in Semiconductor Manufacturing Systems (SMS). Lying on the main concepts of the processinteraction approach, principal components and tools available in the Arena® simulation software were used to achieve the best representation of this complex and highly-constrained manufacturing system. ... This work presents the development and application of an advanced modelling, simulation and optimizationbased framework to the efficient operation of the Automated Wet-etch Station (AWS), a critical stage in Semiconductor Manufacturing Systems (SMS). Lying on the main concepts of the processinteraction approach, principal components and tools available in the Arena® simulation software were used to achieve the best representation of this complex and highly-constrained manufacturing system. Furthermore, advanced Arena templates were utilized for modelling very specific operation features arising in the process under study. The major aim of this work is to provide a novel computer-aided tool to systematically improve the dynamic operation of this critical manufacturing station by quickly generating efficient schedules for the shared processing and transportation devices.

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Palabras Clave

Arena SoftwareAutomated Wet-Etch Station (AWS)Semiconductor Manufacturing System (SMS)Discrete-event Simulation