Science and Technology Production
Book Chapter
Authorship
A. Aguirre
;
V. Cafaro
;
C.A. Méndez
;
P. Castro
Date
2011
Publishing House and Editing Place
Edit. by A. Bruzzone, M.A. Piera, F. Longo, P. Elfrey, M. Affenzeller and O. Balci
Book
Proceedings of the 23rd European Modeling & Simulation Symposium (EMSS2011)
(pp. 384-393)
Edit. by A. Bruzzone, M.A. Piera, F. Longo, P. Elfrey, M. Affenzeller and O. Balci
Edit. by A. Bruzzone, M.A. Piera, F. Longo, P. Elfrey, M. Affenzeller and O. Balci
ISBN
978-88-903724-4-5
Summary
Information provided by the agent in
SIGEVA
This work presents the development and application of an advanced modelling, simulation and optimizationbased framework to the efficient operation of the Automated Wet-etch Station (AWS), a critical stage in Semiconductor Manufacturing Systems (SMS). Lying on the main concepts of the processinteraction approach, principal components and tools available in the Arena® simulation software were used to achieve the best representation of this complex and highly-constrained manufacturing system. ...
This work presents the development and application of an advanced modelling, simulation and optimizationbased framework to the efficient operation of the Automated Wet-etch Station (AWS), a critical stage in Semiconductor Manufacturing Systems (SMS). Lying on the main concepts of the processinteraction approach, principal components and tools available in the Arena® simulation software were used to achieve the best representation of this complex and highly-constrained manufacturing system. Furthermore, advanced Arena templates were utilized for modelling very specific operation features arising in the process under study. The major aim of this work is to provide a novel computer-aided tool to systematically improve the dynamic operation of this critical manufacturing station by quickly generating efficient schedules for the shared processing and transportation devices.
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Key Words
Arena SoftwareAutomated Wet-Etch Station (AWS)Semiconductor Manufacturing System (SMS)Discrete-event Simulation