Science and Technology Production
Article
Authorship
Aguirre, Adrian Marcelo
;
MENDEZ, CARLOS ALBERTO
;
Castro, Pedro M.
Date
2011
Publishing House and Editing Place
PERGAMON-ELSEVIER SCIENCE LTD
Magazine
COMPUTERS AND CHEMICAL ENGINEERING,
vol. 28
(pp. 883-888)
PERGAMON-ELSEVIER SCIENCE LTD
Summary
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This work addresses the short-term scheduling of one of the most critical stages in the semiconductor industry, the automated wet-etch station (AWS). An efficient MILP-based computer-aided tool is developed in order to achieve a proper synchronization between the activities of sequential chemical and water baths and limited automated wafer?s lot transfer devices. The major goal is to find the optimal integrated schedule that maximizes the whole process productivity without generating wafer cont...
This work addresses the short-term scheduling of one of the most critical stages in the semiconductor industry, the automated wet-etch station (AWS). An efficient MILP-based computer-aided tool is developed in order to achieve a proper synchronization between the activities of sequential chemical and water baths and limited automated wafer?s lot transfer devices. The major goal is to find the optimal integrated schedule that maximizes the whole process productivity without generating wafer contamination. Several examples are successfully solved to illustrate the capabilities of the proposed method.
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Key Words
AUTOMATED WET-ETCH STATION (AWS)SEMICONDUCTOR MANUFACTURING SYSTEMS (SMS)SHORT-TERM SCHEDULING PROBLEMMILP-BASED APPROACHSEMICONDUCTOR WAFER FABRICATION
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